Veeco Instruments Introduce TurboDisc K465i GaN Metal Organic Chemical Vapor Deposition System

Veeco Instruments, Inc., has launched the TurboDisc K465i gallium nitride “Metal Organic Chemical Vapor Deposition System” for the production of high-brightness light-emitting diodes.

 

Veeco Instruments (News - Alert) provides metrology and process equipment solutions used by manufacturers in the HB-LED, solar, data storage, semiconductor, scientific research and industrial markets.

 

The demand for HB LEDs is expected to increase in the coming years. In fact, a recent report, “High-Brightness LED Market Review and Forecast 2009” from research firm Strategies Unlimited, had forecasted that the HB LED market will grow from $5.1 billion in 2008 to $14.9 billion in 2013.

 

The new TurboDisc K465i enables higher productivity and reduced cost of ownership when compared to competitive tools. Veeco’s beta-site customers have rapidly qualified the K465i for volume production.

 

Veeco has also received orders for the system from multiple LED customers in the Asia Pacific region. According to Bill Miller (News - Alert), senior vice president and general manager of Veeco’s MOCVD business, the K465i’s superior wavelength uniformity and excellent run-to-run repeatability extends Veeco’s lead in capital efficiency for high-volume LED manufacturers. Miller added that Veeco is pleased that its beta site customers have achieved world-class results in such a short period of time.

 

The new TurboDisc K465i is based on Veeco’s production-proven K-Series platform, according to Veeco. It achieves up to 90 percent yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability. It also offers the industry's highest productivity due to its full automation and shortened recovery period after maintenance.

 

The TurboDisc K465i GaN MOCVD System comprises patent-pending Uniform FlowFlange technology. The K465i, designed to create a uniform alkyl and hydride flow pattern across all wafers, delivers superior uniformity and repeatability.

 

The FlowFlange’s simplified design provides ease of tuning for fast process optimization on wafer sizes up to eight inches and fast tool recovery time after maintenance for the LED industry’s highest productivity.

 

According to John R. Peeler, Veeco’s CEO, the K-Series is a robust, reliable, multi-generational MOCVD platform that is in production at more than 80 percent of the world’s key LED manufacturers. Veeco said it is is committed to advancing its leadership position by increasing R&D investment, introducing innovative new technologies, ramping MOCVD production capacity, and partnering with customers to maximize their LED manufacturing.

 

Peeler added that the K465i MOCVD System is an example of Veeco reducing the cost of LEDs to empower applications such as display backlighting and general illumination.